Inficon Cold Cathode Gauge
The Inficon 850 series cold cathode gauge was used in a broad variety of vacuum systems beginning approximately 1990. This item is new and works great as a replacement for the original CCG in your vintage SEM, FIB and similar tools including the FEI FIB200, FIB800, DB8XX well as the XL-series of SEMs.
| SPECIFICATIONS | |
|---|---|
| Measuring Range | 1x10-7 to 1x10-2 torr |
| Vacuum Connection | KF-25 |
| Materials exposed to vacuum | Stainless steel, graphite, ceramic, pyrex |
| HV supply requirements | 3kV @ 1mA max on start-up 2kV @ 1mA max after start-up |
| Max overpressure | 15 PSIG |
| Volume of tube | 25cc |
| Max operating temp | 50C |
| Max bakeout temp | With magnet removed: 350C |
| Infinicon part # | 850-610-G2 |
