FEI FIB200xP Focused Ion Beam System, fully refurbished

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SKU: 100143 Category:

This FEI FIB200 is the original workhorse FIB, flexible and capable of performing critical operations from cross-sectioning to circuit edit to nano-machining.

Cross-section of thru-silicon via

Cross-section of thru-silicon via prepared using the FIB200

This FIB200 system is fully refurbished, offered at a great price, and comes equipped with:

  • Pre-lens ion column provides image resolution of 7nm and milling current up to 11nA
  • 50x50mm XY stage, with rotation, tilt and z-motions
  • Turbo pump for main chamber
  • Real time monitor to observe milling, aka Leader oscilloscope
  • Keithley Pico-ammeter to measure beam current
  • Chamber camera and monitor
  • Computer control with FEI software and Seiko screen printer
  • Manual user interface (MUI), joystick and mouse controls
  • Manuals
  • Two gas injectors with controller: choose from iodine, XeF2, Platinum, or TEOS gases.  (OPTIONAL) additional gas injectors systems, 4 max.
  • Line transformer (main), AC distribution box and Maintenance tool kit
  • (OPTIONAL) Loadlock with separate pump for fast sample exchange

Don’t forget, we provide key consumables for the FIB200 such as apertures, aperture strips, gas chemistries and Ga LMIS.

This FIB200 can also be used as a platform for our HyperFIB upgrade, for the fastest in FIB milling!

Nano-machining with the FIB200

Nano-machining with the FIB200

FIB cross-section of integrated circuit with FIB200

IC cross-section with the FIB200

Circuit editing with the FIB200

Circuit editing with the FIB200

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