Aperture strip assembly for FEI FEG and SFEG SEMs

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Direct replacement for FEI p/n 4022 260 56901

Also described as the Final Lens Strip Aperture, this product is produced with the same plasma-FIB technology found in our HyperFIB Upgrade system to yield a set of precision micro-machined apertures,  guaranteed to deliver the same quality beam as you’ve experienced for the life of your system.

Unlike the original OEM product which has a thin Mo film on a Si substrate, our SEM aperture strip is made of pure Molybdenum thus avoiding flaking of a Mo film which will affect image resolution.  We recommend installing a new SEM aperture strip assembly yearly, and on each installation of a new electron source for best performance.

This strip is configured with two 30um apertures on each side of a centrally placed 50um aperture, plus a larger diameter aperture for initial beam alignment.

The OEM utilized FEG and SFEG modules on several product lines including:

  • the XL and Quanta Series of SEMs
  • the 235, 830, 835, 860, 865 and 1265 systems FIB-SEM systems,
  • and the Strata, Altura, and Expida series of FIB-SEM systems.

We specialize in custom-configured aperture strips to optimize utilization of your SEM (or FIB) system – Contact Us for more information.