Material for insulator enhanced etching


Gas injector filled with XeF2 (xenon difluoride), provided as a refill of your empty gas injector.  The gas injector crucible is installed on the gas injector and shipped with sealed cap as shown here.

When used in combination with an ion beam impinging the surface where XeF2 is directed, removal of insulating materials such as SiO2 is enhanced, speeding the removal of such materials and reducing the level of redeposition due to the sputtering process.

When received we recommend opening the shipping container and removing the cap in a fume hood or well ventilated area.

Please refer to the Material Safety Data information provided with this product for proper safety and handling information.


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